Method of fabricating a valve unit

Provided are a valve unit (100,150), a microfluidic device (10) including the same, and a method of fabricating the valve unit (100,150). The method includes: forming a lower substrate (15) including a channel (31) including a first region (101,151) and a second region (107,157) which is deeper than...

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Bibliographische Detailangaben
Hauptverfasser:	PARK, JONG-MYEON, CHUNG, JONG-SUK, LEE, JEONG-GUN
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ACTUATING-FLOATS BLASTING CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE COCKS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL TAPS THERMAL INSULATION IN GENERAL TRANSPORTING VALVES WEAPONS
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