LASER GAS INJECTION SYSTEM

A method and apparatus are disclosed which may comprise predicting the gas lifetime for a gas discharge laser light source for a photolithography process, the light source comprising a halogen containing lasing gas may comprise: utilizing at least one of a plurality of laser operating input and/or o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DUNSTAN, Wayne, J, O'BRIEN, Kevin, M, RATNAM, Aravind, JACQUES, Robert, N, BESAUCELE, Herve, A, RIGGS, Daniel, J
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRICITY
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