Substrate and target plate

A substrate is provided, which comprises a structured surface including a regular pattern of a plurality of elevated structures that are elevated with respect to a nominal surface of the substrate, wherein at least two dimensions are between 1nm and 100µm, the structured surface being configured to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LUCIC, IVAN, BALIKA, WERNER, POESCHL, CHRISTIAN, HAUSBERGER, PETER
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS TESTING TRANSPORTING
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