FILTERING FOR A SEMICONDUCTOR PROCESSING TOOL

The present invention provides a filtering system for a semiconductor processing tool. In one embodiment, the filtering system is associated with the semiconductor processing tool. A system of the invention comprises a first and second filter layer in fluid communication with a gas flow path. The fl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KISHKOVICH, Oleg, P, GRAYFER, Anatoly
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
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