ACTIVE SPECTRAL CONTROL OF DUV LIGHT SOURCE
A line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control system comprising: a bandwidth metrology module measuring the bandwidth of a laser output light pulse beam produced by the light source and providing a bandwidth measurement; a bandwi...
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| creator | DUNSTAN, Wayne J RAO, Rajasekhar, M TRINTCHOUK, Fedor, B JACQUES, Robert, N |
| description | A line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control system comprising: a bandwidth metrology module measuring the bandwidth of a laser output light pulse beam produced by the light source and providing a bandwidth measurement; a bandwidth error signal generator receiving the bandwidth measurement and a bandwidth setpoint and providing a bandwidth error signal; a multi-stage actuator system comprising: a coarse bandwidth correction actuator adapted to induce a first modification of the light source that influences the bandwidth of the laser output light pulse beam and targeting large amplitude disturbances occurring at low frequency; a fine bandwidth correction actuator adapted to induce a second modification of the light source that influences the bandwidth of the laser output light pulse beam and targeting small amplitude disturbances occurring at high frequency; an active bandwidth controller providing a fine bandwidth correction actuator signal to said fine bandwidth correction actuator and a coarse bandwidth correction actuator signal to said coarse bandwidth correction actuator responsive to the bandwidth error signal. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_EP1994549B1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>EP1994549B1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_EP1994549B13</originalsourceid><addsrcrecordid>eNrjZNB2dA7xDHNVCA5wdQ4JcvRRcPb3Cwny91Hwd1NwCQ1T8PF09whRCPYPDXJ25WFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8a4BhpaWJqYmlk6GxkQoAQAsBySW</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>ACTIVE SPECTRAL CONTROL OF DUV LIGHT SOURCE</title><source>esp@cenet</source><creator>DUNSTAN, Wayne J ; RAO, Rajasekhar, M ; TRINTCHOUK, Fedor, B ; JACQUES, Robert, N</creator><creatorcontrib>DUNSTAN, Wayne J ; RAO, Rajasekhar, M ; TRINTCHOUK, Fedor, B ; JACQUES, Robert, N</creatorcontrib><description>A line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control system comprising: a bandwidth metrology module measuring the bandwidth of a laser output light pulse beam produced by the light source and providing a bandwidth measurement; a bandwidth error signal generator receiving the bandwidth measurement and a bandwidth setpoint and providing a bandwidth error signal; a multi-stage actuator system comprising: a coarse bandwidth correction actuator adapted to induce a first modification of the light source that influences the bandwidth of the laser output light pulse beam and targeting large amplitude disturbances occurring at low frequency; a fine bandwidth correction actuator adapted to induce a second modification of the light source that influences the bandwidth of the laser output light pulse beam and targeting small amplitude disturbances occurring at high frequency; an active bandwidth controller providing a fine bandwidth correction actuator signal to said fine bandwidth correction actuator and a coarse bandwidth correction actuator signal to said coarse bandwidth correction actuator responsive to the bandwidth error signal.</description><language>eng ; fre ; ger</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; BASIC ELECTRIC ELEMENTS ; CINEMATOGRAPHY ; DEVICES USING STIMULATED EMISSION ; ELECTRICITY ; ELECTROGRAPHY ; HOLOGRAPHY ; MATERIALS THEREFOR ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS</subject><creationdate>2016</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20161207&DB=EPODOC&CC=EP&NR=1994549B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76294</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20161207&DB=EPODOC&CC=EP&NR=1994549B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>DUNSTAN, Wayne J</creatorcontrib><creatorcontrib>RAO, Rajasekhar, M</creatorcontrib><creatorcontrib>TRINTCHOUK, Fedor, B</creatorcontrib><creatorcontrib>JACQUES, Robert, N</creatorcontrib><title>ACTIVE SPECTRAL CONTROL OF DUV LIGHT SOURCE</title><description>A line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control system comprising: a bandwidth metrology module measuring the bandwidth of a laser output light pulse beam produced by the light source and providing a bandwidth measurement; a bandwidth error signal generator receiving the bandwidth measurement and a bandwidth setpoint and providing a bandwidth error signal; a multi-stage actuator system comprising: a coarse bandwidth correction actuator adapted to induce a first modification of the light source that influences the bandwidth of the laser output light pulse beam and targeting large amplitude disturbances occurring at low frequency; a fine bandwidth correction actuator adapted to induce a second modification of the light source that influences the bandwidth of the laser output light pulse beam and targeting small amplitude disturbances occurring at high frequency; an active bandwidth controller providing a fine bandwidth correction actuator signal to said fine bandwidth correction actuator and a coarse bandwidth correction actuator signal to said coarse bandwidth correction actuator responsive to the bandwidth error signal.</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CINEMATOGRAPHY</subject><subject>DEVICES USING STIMULATED EMISSION</subject><subject>ELECTRICITY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>MATERIALS THEREFOR</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2016</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNB2dA7xDHNVCA5wdQ4JcvRRcPb3Cwny91Hwd1NwCQ1T8PF09whRCPYPDXJ25WFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8a4BhpaWJqYmlk6GxkQoAQAsBySW</recordid><startdate>20161207</startdate><enddate>20161207</enddate><creator>DUNSTAN, Wayne J</creator><creator>RAO, Rajasekhar, M</creator><creator>TRINTCHOUK, Fedor, B</creator><creator>JACQUES, Robert, N</creator><scope>EVB</scope></search><sort><creationdate>20161207</creationdate><title>ACTIVE SPECTRAL CONTROL OF DUV LIGHT SOURCE</title><author>DUNSTAN, Wayne J ; RAO, Rajasekhar, M ; TRINTCHOUK, Fedor, B ; JACQUES, Robert, N</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP1994549B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2016</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CINEMATOGRAPHY</topic><topic>DEVICES USING STIMULATED EMISSION</topic><topic>ELECTRICITY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>MATERIALS THEREFOR</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><toplevel>online_resources</toplevel><creatorcontrib>DUNSTAN, Wayne J</creatorcontrib><creatorcontrib>RAO, Rajasekhar, M</creatorcontrib><creatorcontrib>TRINTCHOUK, Fedor, B</creatorcontrib><creatorcontrib>JACQUES, Robert, N</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>DUNSTAN, Wayne J</au><au>RAO, Rajasekhar, M</au><au>TRINTCHOUK, Fedor, B</au><au>JACQUES, Robert, N</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>ACTIVE SPECTRAL CONTROL OF DUV LIGHT SOURCE</title><date>2016-12-07</date><risdate>2016</risdate><abstract>A line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control system comprising: a bandwidth metrology module measuring the bandwidth of a laser output light pulse beam produced by the light source and providing a bandwidth measurement; a bandwidth error signal generator receiving the bandwidth measurement and a bandwidth setpoint and providing a bandwidth error signal; a multi-stage actuator system comprising: a coarse bandwidth correction actuator adapted to induce a first modification of the light source that influences the bandwidth of the laser output light pulse beam and targeting large amplitude disturbances occurring at low frequency; a fine bandwidth correction actuator adapted to induce a second modification of the light source that influences the bandwidth of the laser output light pulse beam and targeting small amplitude disturbances occurring at high frequency; an active bandwidth controller providing a fine bandwidth correction actuator signal to said fine bandwidth correction actuator and a coarse bandwidth correction actuator signal to said coarse bandwidth correction actuator responsive to the bandwidth error signal.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY DEVICES USING STIMULATED EMISSION ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| title | ACTIVE SPECTRAL CONTROL OF DUV LIGHT SOURCE |
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