SCANNING JET NANOLITHOGRAPH AND THE OPERATION METHOD THEREOF

The invention relates to a scanning jet nanolithograph and to the operation method thereof comprising one or several nozzles used for producing one or several jets of a chemically or physically active agent which forms an image on a substrate or carries out the profile cutting of a processed materia...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	TIMOSHCHENKO, IGOR ANDREEVICH
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MANUFACTURE OR TREATMENT THEREOF MATERIALS THEREFOR NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS NANOTECHNOLOGY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TRANSPORTING
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