DEVICE FOR IGNITING AND GENERATING AN EXPANDING DIFFUSE MICROWAVE PLASMA AND DEVICE FOR PLASMA TREATING SURFACES AND SUBSTANCES BY USING THIS PLASMA

The invention relates to a method for igniting and generating an expanding diffuse microwave plasma and to a device for carrying out such a method. The method is particularly suited for generating microwave plasmas for the purpose of carrying out plasma treatment of surfaces and substances, particul...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KROHMANN, UDO, RACKOW, KRISTIAN, NEUMANN, TORSTEN, EHLBECK, JOERG
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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