Process control for the design and fabrication of thermal imaging array modules

The present invention relates to a process control of an infrared thermal imaging array module, which includes the following steps: Perform specification design of thermal imaging module, epitaxy, and verification of optical characteristics for calibrating epitaxial parameters. Perform a fabrication...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WENG, PING-KUO, SHIH, CHIHANG, YANG, SAN-TE, LUO, JIUNN-JYE, CHIANG, CHEN-DER, GAU, YAU-TANG, TANG, SHIANG-FENG
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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