Scanning probe microscope

The invention relates to a scanning probe microscope comprising: - a specimen holder holding a specimen; and - a probe for scanning the relief of the upper surface of the specimen, which probe is movable in a vertical direction and two orthogonal horizontal directions, wherein the upper surface of t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BROEKMAAT, JOSKA JOHANNES, RIJNDERS, AUGUSTINUS JOSEPHUS HELENA MARIA, ROESTHUIS, FRANK JOHAN GERHARDUS, BLANK, DAVID HERMANUS ADRIANUS
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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