METHOD FOR THE PRODUCTION OF A PIEZOELECTRIC ACTUATOR

The invention is a method for producing a piezo actuator starting with the assembly of a plurality of actuator layers made of a ceramic material and a plurality of metallic layer electrodes disposed between the actuator layers to form a green member. The metallic layer electrodes are alternately ele...

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1. Verfasser: MAI, FRANK
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description The invention is a method for producing a piezo actuator starting with the assembly of a plurality of actuator layers made of a ceramic material and a plurality of metallic layer electrodes disposed between the actuator layers to form a green member. The metallic layer electrodes are alternately electrically connected a respective terminal electrode via which a voltage can be applied to the layer electrodes. The terminal electrode extends within the piezo actuator through respective longitudinal bores. The piezo actuator has an end face and an opposing base. According to the inventive production method, the terminal electrode protrudes from the end face of the green member. The green member is heated until the sintering process has been completed, during which the end of the terminal electrode that protrudes from the end face is supported such that the green member is not deformed during the sintering process. A piezo actuator produced according to the method encompasses at least one terminal electrode which is configured in a tubular manner and extends inside the piezo actuator.
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title METHOD FOR THE PRODUCTION OF A PIEZOELECTRIC ACTUATOR
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