TEST CELLS FOR SEMICONDUCTOR YIELD IMPROVEMENT

A test cell for localizing defects includes a first active region, a second active region formed substantially parallel to the first active region, a third active region formed substantially parallel to the first and second active regions, a fourth active region formed between the first and second a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZWALD, MARK, STINE, BRIAN, TONELLO, STEFANO, KITCH, VICTOR
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INFORMATION STORAGE PHYSICS SEMICONDUCTOR DEVICES STATIC STORES
Online-Zugang:	Volltext bestellen
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