RASTER NEAR FIELD MICROSCOPY IN THE MICROWAVE AND TERAHERTZ RANGES WITH A SIGNAL PROCESSING DEVICE INTEGRATED IN THE MEASURING TIP

RASTER NEAR FIELD MICROSCOPY IN THE MICROWAVE AND TERAHERTZ RANGES WITH A SIGNAL PROCESSING DEVICE INTEGRATED IN THE MEASURING TIP

An imaging microwave probe (1) with at least one measuring tip (5) on a measuring arm (2), whereby at least one of the measuring tips (5) has an antenna (6) for the detection or emission of electromagnetic signals and the measuring tip is significantly smaller in the near field than the wavelength o...

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Hauptverfasser: SCHILLING, MEINHARD, KAESTNER, ANDRE, STEWING, FELIX
Format: Patent
Sprache:eng ; fre ; ger
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APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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creator SCHILLING, MEINHARD
KAESTNER, ANDRE
STEWING, FELIX
description An imaging microwave probe (1) with at least one measuring tip (5) on a measuring arm (2), whereby at least one of the measuring tips (5) has an antenna (6) for the detection or emission of electromagnetic signals and the measuring tip is significantly smaller in the near field than the wavelength of the electromagnetic signals, a positioning device for positioning of an object (3) for measuring relative to the measuring tip (5) in at least one spatial dimension (X, Y, Z), with a signal processing device (7) in electrical connection to the antenna (6) for conversion of the sensor signal from the antenna to a measured signal with a reduced frequency suitable for analysis or for conversion of a coupling signal with reduced frequency into a signal for transmission from the antenna (6) are described. The signal processing device (7) is integrated on the measuring tip (5) adjacent to the antenna (6) and a measured/coupling signal path (8) for the measured and/or coupling signal running from the signal processing device (7) to a measuring unit (9) arranged at a separation from the measuring tip at a frequency selected such that the measured and /or coupling signal is provided in the measuring region without significant distortion.
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language eng ; fre ; ger
recordid cdi_epo_espacenet_EP1856701B1
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subjects APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
title RASTER NEAR FIELD MICROSCOPY IN THE MICROWAVE AND TERAHERTZ RANGES WITH A SIGNAL PROCESSING DEVICE INTEGRATED IN THE MEASURING TIP
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