Method for manufacturing a layered structure

Method for manufacturing a layered structure

Laminar structure production produces a structure with a smoothed intermediate layer and another layer lying on top of it. The intermediate layer is treated with a gaseous etching agent containing hydrogen fluoride. Some material is thereby eroded, causing the intermediate layer to be made smooth.

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Bibliographische Detailangaben
Hauptverfasser: FEIJOO, DIEGO, SCHWAB, GUENTER, BUSCHHARDT, THOMAS
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Laminar structure production produces a structure with a smoothed intermediate layer and another layer lying on top of it. The intermediate layer is treated with a gaseous etching agent containing hydrogen fluoride. Some material is thereby eroded, causing the intermediate layer to be made smooth.