Polymer linear actuator for MEMS and for a micro manipulator for measurement device of cranial nerve signals

A polymer linear actuator for a micro electro mechanical system (MEMS) and a micro manipulator for a measurement device of cranial nerve signal using the same are provided. The polymer linear actuator has first and second bodies positioned spaced apart to a distance from each other, and one or more...

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Bibliographische Detailangaben

Hauptverfasser:	PARK, SUK-HO, KIM, HUI-SU, HONG, JU-HEE, YANG, SUNG-WWOK, KIM, JIN-SEOK, LEE, SUKAN, SHIN, HEE-SUP, LEE, DONG-WON
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
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