MEASURING ELASTIC MODULI OF DIELECTRIC THIN FILMS USING AN OPTICAL METROLOGY SYSTEM

An optical metrology system is provided with a data analysis method to determine the elastic moduli of optically transparent dielectric films such as silicon dioxide, other carbon doped oxides over metal or semiconductor substrates. An index of refraction is measured by an ellipsometer and a wavelen...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ANTONELLI, GEORGE, A, LUDKE, JAMIE L, KOTELYANSKII, MICHAEL, ZHENG, TONG, MILLER, ANDRE, D, LEARY, SEAN P, TAS, GURAY, MORATH, CHRISTOPHER, J, LAZAROV, GUENADIY
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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