Lithographic apparatus with sensor mount

A lithographic apparatus is disclosed in which a circular sensor is mounted to a substrate table with three leaf springs that are evenly spaced around a thermal axis of the sensor. The leaf springs are provided in two parts that are releasably attachable to each other. The leaf springs are elastic a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SMITS, PETER, CORNELISSEN, SEBASTIAAN MARIA JOHANNES, OTTENS, CORNELIS CHRISTIAAN, CUIJPERS, MARTINUS AGNES WILLEM, VAN DE WAL, JOHANNES ANTONIUS MRIA
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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