LASER ATOM PROBE METHODS

A laser atom probe situates a counter electrode between a specimen mount and a detector, and provides a laser having its beam aligned to illuminate the specimen through the aperture of the counter electrode. The detector, specimen mount, and/or the counter electrode may be charged to some boost volt...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BUNTON, JOSEPH, H, OLSON, JESSE, D
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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