PROCESS AND DEVICE FOR CLEANING AND ETCHING A SUBSTRATE WITH A TRANSPARENT CONDUCTIVE OXIDE LAYER

A simple process is disclosed for treating substrates having pre-structured zinc oxide layers on rigid or flexible supports. The ZnO is treated with an etching medium then with a cleaning liquid. The treatment with the etching and cleaning liquids is carried out while the substrate is conveyed throu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	APENZELLER, WOLFGANG, SEHRBROCK, BRIGITTE, MUELLER, JOACHIM, REPMANN, TOBIAS, SIEKMANN, HILDEGARD, RECH, BERND, SCHOEPE, GUNNAR
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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