IMPROVED RAILS FOR SEMICONDUCTOR WAFER CARRIERS

A rail is provided for use as a support in an apparatus for holding a plurality of semiconductor wafers. The rail has a plurality of teeth arranged in a vertical column, such that the space between a top surface of one tooth and a bottom surface of the next higher adjacent tooth forms a slot for rec...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WERNINGHAUS, THOMAS, BROWN, STEVEN, A, GONZALES, MANUEL, KOPEL, CLAUDIA
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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