SYSTEM AND METHOD FOR DETECTING THE DISPLACEMENT OF A PLURALITY OF MICRO- AND NANOMECHANICAL ELEMENTS, SUCH AS MICRO-CANTILEVERS

The invention relates to a system and method for detecting the displacement, such as the deflection, of a plurality of elements (1), such as microcantilevers, forming part of an array (2), by emitting a light beam (4) towards the array (2) and by receiving a reflected light beam on an optical positi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAMAYO DE MIGUEL, FRANCISCO JAVIER, LECHUGA GOMEZ, LAURA M, ALVAREZ SANCHEZ, MAR
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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