FLUID-COOLED ION SOURCE

An ion source is cooled using a cooling plate that is separate and independent of the anode. The cooling plate forms a coolant cavity through which a fluid coolant (e.g., liquid or gas) can flow to cool the anode. In such configurations, the magnet may be thermally protected by the cooling plate. A...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BURTNER, DAVID, MATTHEW, TOWNSEND, SCOTT, A, SIEGFRIED, DANIEL, E, ZHURIN, VIACHESLAV, V
Format: Patent
Sprache:eng ; fre ; ger
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