DEVICE FOR APPLYING A LIQUID DOPANT SOLUTION ON A WAFER

Device ( 1 ) for applying a liquid dopant solution on a wafer ( 3 ), comprising a dopant distribution device ( 5 ), a rotatable horizontally translatable dopant-transfer roll ( 7 ) between a first roll position ( 15 ) and a second roll position, and a work table ( 9 ) for holding the wafer ( 3 ), wh...

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Bibliographische Detailangaben

1. Verfasser:	MUENZER, ADOLF
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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