amorphous-carbon coated member

An amorphous-carbon coated member includes a conductive substrate, and an amorphous carbon film. The amorphous carbon film is fixed onto a part of a surface of the substrate at least, and includes a compositionally gradient film. The compositionally gradient film has an outer side and a substrate si...

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Bibliographische Detailangaben
Hauptverfasser:	MORI, HIROYUKI, TACHIKAWA, HIDEO, ANDO, JUNJI, NAKANISHI, KAZUYUKI, SAITO, TOSHIYUKI
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	An amorphous-carbon coated member includes a conductive substrate, and an amorphous carbon film. The amorphous carbon film is fixed onto a part of a surface of the substrate at least, and includes a compositionally gradient film. The compositionally gradient film has an outer side and a substrate side, and is composed of carbon, silicon and hydrogen. The silicon concentration inclines continuously from the lowest to the highest in the direction away from the outer side to the substrate side. The hydrogen concentration inclines continuously from the highest to the lowest in the direction away from the outer side to the substrate side. The amorphous-carbon coated member exhibits not only good wear resistance but also low aggressiveness against mating member simultaneously.