METHODS FOR INSPECTION OF A SPECIMEN USING DIFFERENT INSPECTION PARAMETERS

Methods and systems for inspection of a specimen using different parameters are provided. One computer-implemented method includes determining optimal parameters for inspection based on selected defects. This method also includes setting parameters of an inspection system at the optimal parameters p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MARELLA, PAUL, FRANK, FU, TAO-YI, HWANG, SHIOW-HWEI, LANGE, STEVE, R, CEGLIO, NAT
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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