METHODS FOR IMPROVING FLOW THROUGH FLUIDIC CHANNELS
A method for improving fluidic flow for a microfluidic device having a through hole or slot therein. The method includes the steps of forming one or more openings through at least part of a thickness of a substrate from a first surface to an opposite second surface using a reactive ion etching proce...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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