METHODS FOR IMPROVING FLOW THROUGH FLUIDIC CHANNELS

A method for improving fluidic flow for a microfluidic device having a through hole or slot therein. The method includes the steps of forming one or more openings through at least part of a thickness of a substrate from a first surface to an opposite second surface using a reactive ion etching proce...

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Hauptverfasser: MRVOS, JAMES, M, MONEY, CHRISTOPHER, J, MCNEES, ANDREW, L, VANDERPOOL, JASON, T, HAMMOND, CORY, N, KARTHIK, VAIDEESWARAN, PATIL, GIRISH, S, WILLIAMS, GARY, R, WARNER, RICHARD, L, KRAWCZYK, JOHN, W, DOERRE, MARK, L
Format: Patent
Sprache:eng ; fre ; ger
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