DETECTOR SYSTEM FOR A SCANNING ELECTRON MICROSCOPE AND SCANNING ELECTRON MICROSCOPE WITH A CORRESPONDING DETECTOR SYSTEM

With a detector system for the specimen chamber of a scanning electron microscope, signals are simultaneously detected in transmission which signals correspond to a light field contrast and a dark field contrast. The detector system ( 14 ) includes four detectors ( 15 to 18 ) in a plane ( 25 ) betwe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JAKSCH, HEINER, BIHR, JOHANNES
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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