Compositions for preparing low dielectric materials containing solvents

Silica-based materials and films having a dielectric constant of 3.7 or below and compositions and methods for making and using same are disclosed herein. In one aspect, there is provided a composition for preparing a silica-based material comprising an at least one silica source, a solvent, an at l...

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Bibliographische Detailangaben
Hauptverfasser: KHOT, SHRIKANT NARENDRA, PETERSON, BRIAN KIETH, WEIGEL, SCOTT JEFFREY, MACDOUGALL, JAMES EDWARD, BRAYMER, THOMAS ALBERT, KIRNER, JOHN FRANCIS
Format: Patent
Sprache:eng ; fre ; ger
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