INSPECTION APPARATUS OF WIRING PATTERN, INSPECTION METHOD, DETECTION APPARATUS, DETECTION METHOD

A wiring pattern inspection apparatus comprises a light source (10), a parallel light guiding section which guides light from the light source substantially in parallel, and a light extraction section which extracts a transverse wave light component crossing the light guiding direction at right angl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MITSUHASHI, MITSUYUKI, SAITO, MASAO
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION TESTING
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