Pressure sensor, method of fabricating the same, and method of calibrating the same

A pressure sensor having a digital output includes a substrate formed with plural channels, and a gating part formed in such a way that an area confronting with the plural channels is spaced from the substrate and moved in response to an external pressure, thereby making the plural channels selectiv...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KANG, JUNG-HO, NAM, AN-SIK, PARK, TAE-SIK, WON, JONG-HWA
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS PUBLIC ADDRESS SYSTEMS SEMICONDUCTOR DEVICES TESTING
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