PHOTODETECTOR CIRCUITS

A photodetector circuit incorporates an APD detector structure ( 10 ) comprising a p- silicon handle wafer ( 12 ) on which a SiO2 insulation layer ( 14 ) is deposited in known manner. During manufacture a circular opening ( 16 ) is formed through the insulation layer ( 14 ) by conventional photolith...

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Bibliographische Detailangaben
Hauptverfasser: MARSHALL, GILLIAN, FIONA, LEONG, WENG, YEE, ROBBINS, DAVID, JOHN
Format: Patent
Sprache:eng ; fre ; ger
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