INTEGRATED DRIVER PROCESS FLOW

An integrated device includes one or more device drivers and a micro-electro-mechanical system (MEMS) structure monolithically coupled to the one or more device drivers. The one or more device drivers are configured to process received control signals and to transmit the processed control signals to...

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Bibliographische Detailangaben
1. Verfasser: HUNTER, JAMES, A
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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