METHOD OF MANUFACTURING A SEMICONDUCTOR NON-VOLATILE MEMORY

A method of manufacturing a semiconductor device comprising a non-volatile memory with memory transistors and selection transistors. In this method a semiconductor body is provided with strip-shaped active regions ( 4 ) which are mutually isolated by field-oxide regions ( 3 of 4 ). On the surface (...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SLOTBOOM, MICHIEL, VAN SCHAIJK, ROBERTUS, T., F
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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