INFORMATION ACQUISITION APPARATUS, CROSS SECTION EVALUATING APPARATUS, AND CROSS SECTION EVALUATING METHOD

The invention provides a cross section evaluating apparatus capable of analyzing the cross sectional structure in a state where the temperature of the specimen is regulated. There is disclosed an information acquisition apparatus comprising a stage for placing the specimen, temperature regulation me...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	UENO, RIE, MOTOI, TAIKO
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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