METHOD FOR PRODUCING A SCALE, SCALE PRODUCED ACCORDING TO SAID METHOD AND A POSITION MEASURING DEVICE

In a method for producing a scale in the form of a phase grating, the scale itself, and a position measuring device including the scale, the scale includes two reflection layers located at a distance from one another on either side of a spacer layer. The production of the scale includes the followin...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SPECKBACHER, PETER, FLATSCHER, GEORG
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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