PRODUCTION OF CARBON NANOTUBES

PRODUCTION OF CARBON NANOTUBES

A method of forming carbon nanotubes by plasma enhanced chemical vapor deposition using a carbon containing gas plasma, wherein the carbon nanotubes are not formed on a substrate at a temperature 300° C. or above.

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Hauptverfasser: SILVA, PROFESSOR SEMBUKUTIARACHILAGE RAVI, BOSKOVIC, BOJAN O, HAQ, SAJAD
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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creator SILVA, PROFESSOR SEMBUKUTIARACHILAGE RAVI
BOSKOVIC, BOJAN O
HAQ, SAJAD
description A method of forming carbon nanotubes by plasma enhanced chemical vapor deposition using a carbon containing gas plasma, wherein the carbon nanotubes are not formed on a substrate at a temperature 300° C. or above.
format Patent
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subjects CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
title PRODUCTION OF CARBON NANOTUBES
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