Method for detecting quantity variation of high purity liquid chemicals and devices to carry out the method

This invention relatives to a method for detecting quantity variation of high purity liquid chemicals by way of detecting capacitance variation to determine the liquid level of liquid chemicals. Meanwhile, the ratio of the area of the smallest electrode of the capacitor to the distance between the e...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHU, CHENG-JYE, CHANG, GOANGNG, LIN, CHI-HUI, LEE, PAI-MOU
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS TESTING
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