RAPID THERMAL PROCESSING SYSTEM FOR INTEGRATED CIRCUITS

In a rapid thermal processing system an array of heat lamps generate radiant heat for heating the surfaces of a semiconductor substrate, such as a semiconductor wafer, to a selected temperature or set of temperatures while held within an enclosed chamber. The heat lamps are surrounded individually o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAUF, MARKUS, TAY, SING-PIN, HU, YAO, ZHI
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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