Flow sensor and method of manufacturing the same

Flow sensor and method of manufacturing the same

A flow sensor includes a substrate, an electrical insulating film, and a flow velocity detection mechanism. In the substrate, a diaphragm portion having a first surface in contact with a measurement target fluid and a thick fixing portion surrounding the diaphragm portion are integrally formed. The...

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Hauptverfasser: Shoji, Kamiunten, Koji, Seki, Seishi, Nakano, Shinichi, Ike, Nobuhiko, Zushi, Tarou, Nakata
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
MEASURING
MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL
METERING BY VOLUME
PHYSICS
TESTING
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creator Shoji, Kamiunten
Koji, Seki
Seishi, Nakano
Shinichi, Ike
Nobuhiko, Zushi
Tarou, Nakata
description A flow sensor includes a substrate, an electrical insulating film, and a flow velocity detection mechanism. In the substrate, a diaphragm portion having a first surface in contact with a measurement target fluid and a thick fixing portion surrounding the diaphragm portion are integrally formed. The electrical insulating film is formed on a second surface of the diaphragm portion which is on a side opposite to the first surface. The flow velocity detection mechanism is arranged on the electrical insulating film. A method of manufacturing a flow sensor is also disclosed.
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subjects MEASURING
MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL
METERING BY VOLUME
PHYSICS
TESTING
title Flow sensor and method of manufacturing the same
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