PATTERN FORMING METHOD AND DEVICE AND SEMICONDUCTOR DEVICE, ELECTRIC CIRCUIT, DISPLAY ELEMENT MODULE AND LUMINOUS ELEMENT

A pattern material supply unit (300) has a shower head (310) for producing a particle mist from the liquid pattern material (312) and discharging the mist. A process stage (318) on which the workpiece (20) is placed is disposed below the shower head (310). A hydrophobic processed mask with pattern f...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SATO, MITSURU, TAKAGI, KENICHI, ASUKE, SHINTARO, MORI, YOSHIAKI, MIYAKAWA, TAKUYA
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS PRINTED CIRCUITS SEMICONDUCTOR DEVICES
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