CONDUCTIVE PROBE FOR SCANNING MICROSCOPE AND MACHINING METHOD USING THE SAME

CONDUCTIVE PROBE FOR SCANNING MICROSCOPE AND MACHINING METHOD USING THE SAME

A conductive probe for a scanning type microscope that captures the substance information of the surface of a specimen by the tip end of a conductive nanotube probe needle fastened to a cantilever, in which the conductive probe is constructed from a conductive film formed on the surface of the canti...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NAKAYAMA, YOSHIKAZU, HARADA, AKIO, YASUTAKE, M, SHIRAKAWABE,Y, TAKANO, YUICHI, AKITA, SEIJI, OKAWA, TAKASHI
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MANUFACTURE OR TREATMENT THEREOF
MEASURING
NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS
NANOTECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
TRANSPORTING
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Beschreibung
Zusammenfassung:A conductive probe for a scanning type microscope that captures the substance information of the surface of a specimen by the tip end of a conductive nanotube probe needle fastened to a cantilever, in which the conductive probe is constructed from a conductive film formed on the surface of the cantilever, a conductive nonatube with its base end portion being fixed in contact which the surface of a predetermined of the cantilever, and a conductive deposit which fastens the conductive nanotube by covering from the base end portion of the nonatube to a part of the conductive film. The conductive nonatube and the conductive film are electrically connected to each other by the conductive deposit.