METHOD FOR CORRECTING PHYSICAL ERRORS IN MEASURING MICROSCOPIC OBJECTS

A method of correcting physically conditioned errors in the measurement of an object detects an image of the object to be measured, measures the imaged object, determines a measurement error caused by structural surroundings of the object, and corrects the measurement result in dependence on the mea...

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Hauptverfasser: EISENMANN, HANS, WAAS, THOMAS, BRUECK, HANS-JUERGEN, HARTMANN, HANS
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Sprache:eng ; fre ; ger
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creator EISENMANN, HANS
WAAS, THOMAS
BRUECK, HANS-JUERGEN
HARTMANN, HANS
description A method of correcting physically conditioned errors in the measurement of an object detects an image of the object to be measured, measures the imaged object, determines a measurement error caused by structural surroundings of the object, and corrects the measurement result in dependence on the measurement error.
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language eng ; fre ; ger
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subjects MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
title METHOD FOR CORRECTING PHYSICAL ERRORS IN MEASURING MICROSCOPIC OBJECTS
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