METHOD FOR CORRECTING PHYSICAL ERRORS IN MEASURING MICROSCOPIC OBJECTS
A method of correcting physically conditioned errors in the measurement of an object detects an image of the object to be measured, measures the imaged object, determines a measurement error caused by structural surroundings of the object, and corrects the measurement result in dependence on the mea...
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creator | EISENMANN, HANS WAAS, THOMAS BRUECK, HANS-JUERGEN HARTMANN, HANS |
description | A method of correcting physically conditioned errors in the measurement of an object detects an image of the object to be measured, measures the imaged object, determines a measurement error caused by structural surroundings of the object, and corrects the measurement result in dependence on the measurement error. |
format | Patent |
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language | eng ; fre ; ger |
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subjects | MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING |
title | METHOD FOR CORRECTING PHYSICAL ERRORS IN MEASURING MICROSCOPIC OBJECTS |
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