Wafer holding device
A wafer holding device, comprising a rotating baseplate (12), a wafer seat (13) which is provided on the rotating baseplate coaxially with the rotating baseplate and which receives a peripheral edge of a wafer (7) by a circumference, a predetermined number of chuck levers (25) rotatably mounted on t...
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| Format: | Patent |
| Sprache: | eng ; fre ; ger |
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| Zusammenfassung: | A wafer holding device, comprising a rotating baseplate (12), a wafer seat (13) which is provided on the rotating baseplate coaxially with the rotating baseplate and which receives a peripheral edge of a wafer (7) by a circumference, a predetermined number of chuck levers (25) rotatably mounted on the wafer seat so that the chuck levers can be rotated around an axis extending in a tangential direction on a circumference of the rotating baseplate, and springs (28) for resiliently pushing an end of the chuck lever toward the wafer seat, wherein the peripheral edge of the wafer received on the wafer seat is pinched by the wafer seat and the chuck lever. |
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