Wafer holding device

A wafer holding device, comprising a rotating baseplate (12), a wafer seat (13) which is provided on the rotating baseplate coaxially with the rotating baseplate and which receives a peripheral edge of a wafer (7) by a circumference, a predetermined number of chuck levers (25) rotatably mounted on t...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	NOGUCHI, IKUO
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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