GRINDING PIN FOR GRINDING MACHINES COMPRISING RESIN BONDED SECTIONS OF ROUGH GRIT AND FINE GRIT

A grinding pin (53) for grinding notches in the edges of disc workpieces, such as semi-conductor wafers, comprises a metal spindle (132) for mounting in a grinding machine, and an adjoining cylindrical region having axially spaced sections of fine grit (160) and rough grit (162), the latter being ax...

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Bibliographische Detailangaben
1. Verfasser:	STOCKER, MARK, ANDREW
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TOOLS FOR GRINDING, BUFFING, OR SHARPENING TRANSPORTING
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Beschreibung
Zusammenfassung:	A grinding pin (53) for grinding notches in the edges of disc workpieces, such as semi-conductor wafers, comprises a metal spindle (132) for mounting in a grinding machine, and an adjoining cylindrical region having axially spaced sections of fine grit (160) and rough grit (162), the latter being axially nearer the spindle (132). In use on a grinding machine having a rotatable forming wheel, similar profiled notch-grinding grooves (140) and (142) are formed by the wheel in the grinding sections (162) and (160) respectively.