X/Y stage and exposure apparatus using the same
A moving/guiding apparatus has X- and Y-direction movable bodies guided and moved in intersecting directions, arranged at vertically different positions, and restrained in a vertical direction, respectively, and an X-Y movable body guided vertically on a surface plate (11) and movable in moving dire...
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| creator | SAKINO, SHIGEO |
| description | A moving/guiding apparatus has X- and Y-direction movable bodies guided and moved in intersecting directions, arranged at vertically different positions, and restrained in a vertical direction, respectively, and an X-Y movable body guided vertically on a surface plate (11) and movable in moving directions of the X- and Y-direction movable bodies. A vacuum container is provided for accommodating these movable bodies. Actuators for driving the X-direction movable body (41) and Y-direction movable body (42) in the intersecting directions are set outside the vacuum container. The movable body (3) is driven in two intersecting directions upon reception of forces from guide surfaces in a horizontal direction of the movable bodies (41, 42). |
| format | Patent |
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A vacuum container is provided for accommodating these movable bodies. Actuators for driving the X-direction movable body (41) and Y-direction movable body (42) in the intersecting directions are set outside the vacuum container. The movable body (3) is driven in two intersecting directions upon reception of forces from guide surfaces in a horizontal direction of the movable bodies (41, 42).</description><edition>7</edition><language>eng ; fre ; ger</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; BASIC ELECTRIC ELEMENTS ; CINEMATOGRAPHY ; CONTROL OR REGULATING SYSTEMS IN GENERAL ; CONTROLLING ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; ELECTROGRAPHY ; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS ; HOLOGRAPHY ; MATERIALS THEREFOR ; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS ; REGULATING ; SEMICONDUCTOR DEVICES</subject><creationdate>2003</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20031217&DB=EPODOC&CC=EP&NR=1248152A3$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20031217&DB=EPODOC&CC=EP&NR=1248152A3$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SAKINO, SHIGEO</creatorcontrib><title>X/Y stage and exposure apparatus using the same</title><description>A moving/guiding apparatus has X- and Y-direction movable bodies guided and moved in intersecting directions, arranged at vertically different positions, and restrained in a vertical direction, respectively, and an X-Y movable body guided vertically on a surface plate (11) and movable in moving directions of the X- and Y-direction movable bodies. A vacuum container is provided for accommodating these movable bodies. Actuators for driving the X-direction movable body (41) and Y-direction movable body (42) in the intersecting directions are set outside the vacuum container. The movable body (3) is driven in two intersecting directions upon reception of forces from guide surfaces in a horizontal direction of the movable bodies (41, 42).</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CINEMATOGRAPHY</subject><subject>CONTROL OR REGULATING SYSTEMS IN GENERAL</subject><subject>CONTROLLING</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>ELECTROGRAPHY</subject><subject>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</subject><subject>HOLOGRAPHY</subject><subject>MATERIALS THEREFOR</subject><subject>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><subject>REGULATING</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2003</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNCP0I9UKC5JTE9VSMxLUUitKMgvLi0CcgoKEosSS0qLFUqLM_PSFUoyUhWKE3NTeRhY0xJzilN5oTQ3g4Kba4izh25qQX58anFBYnJqXmpJvGuAoZGJhaGpkaOxMRFKAKEjKhA</recordid><startdate>20031217</startdate><enddate>20031217</enddate><creator>SAKINO, SHIGEO</creator><scope>EVB</scope></search><sort><creationdate>20031217</creationdate><title>X/Y stage and exposure apparatus using the same</title><author>SAKINO, SHIGEO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP1248152A33</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2003</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CINEMATOGRAPHY</topic><topic>CONTROL OR REGULATING SYSTEMS IN GENERAL</topic><topic>CONTROLLING</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>ELECTROGRAPHY</topic><topic>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</topic><topic>HOLOGRAPHY</topic><topic>MATERIALS THEREFOR</topic><topic>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><topic>REGULATING</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>SAKINO, SHIGEO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SAKINO, SHIGEO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>X/Y stage and exposure apparatus using the same</title><date>2003-12-17</date><risdate>2003</risdate><abstract>A moving/guiding apparatus has X- and Y-direction movable bodies guided and moved in intersecting directions, arranged at vertically different positions, and restrained in a vertical direction, respectively, and an X-Y movable body guided vertically on a surface plate (11) and movable in moving directions of the X- and Y-direction movable bodies. A vacuum container is provided for accommodating these movable bodies. Actuators for driving the X-direction movable body (41) and Y-direction movable body (42) in the intersecting directions are set outside the vacuum container. The movable body (3) is driven in two intersecting directions upon reception of forces from guide surfaces in a horizontal direction of the movable bodies (41, 42).</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS HOLOGRAPHY MATERIALS THEREFOR MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS REGULATING SEMICONDUCTOR DEVICES |
| title | X/Y stage and exposure apparatus using the same |
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