Optical system with electronic spot size control and focus control optics
An illumination system includes optics capable of adjusting the size of a beam of light and adjusting the focus of the beam of light. Spot size control optics adjusts the overall size of the beam of light and separately adjusts the ellipticity of the beam, primarily in one dimension. Light from the...
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| creator | WU, XINGKUN PARTANEN, JOUNI P TANG, NANSHENG |
| description | An illumination system includes optics capable of adjusting the size of a beam of light and adjusting the focus of the beam of light. Spot size control optics adjusts the overall size of the beam of light and separately adjusts the ellipticity of the beam, primarily in one dimension. Light from the spot size control optics passes to focus control optics that control the overall focus of the beam of light and adjust the astigmatism of the beam by altering the focus position of the beam of light in one dimension. The laser system, the spot size control optics and the focus control optics are within an enclosure. Actuators under remote control from outside of the enclosure adjust both of the spot size control optics and focus control optics in the thermal environment of the illumination system. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_EP1237034B1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>EP1237034B1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_EP1237034B13</originalsourceid><addsrcrecordid>eNrjZPD0LyjJTE7MUSiuLC5JzVUozyzJUEjNSU0uKcrPy0xWKC7IL1EozqxKVUjOzwOK5Sgk5qUopOUnlxbDRfJBRhTzMLCmJeYUp_JCaW4GBTfXEGcP3dSC_PjU4oLE5NS81JJ41wBDI2NzA2MTJ0NjIpQAALmrNL8</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Optical system with electronic spot size control and focus control optics</title><source>esp@cenet</source><creator>WU, XINGKUN ; PARTANEN, JOUNI P ; TANG, NANSHENG</creator><creatorcontrib>WU, XINGKUN ; PARTANEN, JOUNI P ; TANG, NANSHENG</creatorcontrib><description>An illumination system includes optics capable of adjusting the size of a beam of light and adjusting the focus of the beam of light. Spot size control optics adjusts the overall size of the beam of light and separately adjusts the ellipticity of the beam, primarily in one dimension. Light from the spot size control optics passes to focus control optics that control the overall focus of the beam of light and adjust the astigmatism of the beam by altering the focus position of the beam of light in one dimension. The laser system, the spot size control optics and the focus control optics are within an enclosure. Actuators under remote control from outside of the enclosure adjust both of the spot size control optics and focus control optics in the thermal environment of the illumination system.</description><language>eng ; fre ; ger</language><subject>AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING ; APPARATUS SPECIALLY ADAPTED THEREFOR ; CINEMATOGRAPHY ; CLADDING OR PLATING BY SOLDERING OR WELDING ; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ; ELECTROGRAPHY ; HOLOGRAPHY ; INFORMATION STORAGE ; INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER ; MACHINE TOOLS ; MATERIALS THEREFOR ; METAL-WORKING NOT OTHERWISE PROVIDED FOR ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; ORIGINALS THEREFOR ; PERFORMING OPERATIONS ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS ; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR ; SHAPING OR JOINING OF PLASTICS ; SOLDERING OR UNSOLDERING ; TRANSPORTING ; WELDING ; WORKING BY LASER BEAM ; WORKING OF PLASTICS ; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL</subject><creationdate>2006</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20060621&DB=EPODOC&CC=EP&NR=1237034B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20060621&DB=EPODOC&CC=EP&NR=1237034B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WU, XINGKUN</creatorcontrib><creatorcontrib>PARTANEN, JOUNI P</creatorcontrib><creatorcontrib>TANG, NANSHENG</creatorcontrib><title>Optical system with electronic spot size control and focus control optics</title><description>An illumination system includes optics capable of adjusting the size of a beam of light and adjusting the focus of the beam of light. Spot size control optics adjusts the overall size of the beam of light and separately adjusts the ellipticity of the beam, primarily in one dimension. Light from the spot size control optics passes to focus control optics that control the overall focus of the beam of light and adjust the astigmatism of the beam by altering the focus position of the beam of light in one dimension. The laser system, the spot size control optics and the focus control optics are within an enclosure. Actuators under remote control from outside of the enclosure adjust both of the spot size control optics and focus control optics in the thermal environment of the illumination system.</description><subject>AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING</subject><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>CINEMATOGRAPHY</subject><subject>CLADDING OR PLATING BY SOLDERING OR WELDING</subject><subject>CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>INFORMATION STORAGE</subject><subject>INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER</subject><subject>MACHINE TOOLS</subject><subject>MATERIALS THEREFOR</subject><subject>METAL-WORKING NOT OTHERWISE PROVIDED FOR</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>ORIGINALS THEREFOR</subject><subject>PERFORMING OPERATIONS</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><subject>SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR</subject><subject>SHAPING OR JOINING OF PLASTICS</subject><subject>SOLDERING OR UNSOLDERING</subject><subject>TRANSPORTING</subject><subject>WELDING</subject><subject>WORKING BY LASER BEAM</subject><subject>WORKING OF PLASTICS</subject><subject>WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2006</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZPD0LyjJTE7MUSiuLC5JzVUozyzJUEjNSU0uKcrPy0xWKC7IL1EozqxKVUjOzwOK5Sgk5qUopOUnlxbDRfJBRhTzMLCmJeYUp_JCaW4GBTfXEGcP3dSC_PjU4oLE5NS81JJ41wBDI2NzA2MTJ0NjIpQAALmrNL8</recordid><startdate>20060621</startdate><enddate>20060621</enddate><creator>WU, XINGKUN</creator><creator>PARTANEN, JOUNI P</creator><creator>TANG, NANSHENG</creator><scope>EVB</scope></search><sort><creationdate>20060621</creationdate><title>Optical system with electronic spot size control and focus control optics</title><author>WU, XINGKUN ; PARTANEN, JOUNI P ; TANG, NANSHENG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP1237034B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2006</creationdate><topic>AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING</topic><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>CINEMATOGRAPHY</topic><topic>CLADDING OR PLATING BY SOLDERING OR WELDING</topic><topic>CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>INFORMATION STORAGE</topic><topic>INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER</topic><topic>MACHINE TOOLS</topic><topic>MATERIALS THEREFOR</topic><topic>METAL-WORKING NOT OTHERWISE PROVIDED FOR</topic><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>ORIGINALS THEREFOR</topic><topic>PERFORMING OPERATIONS</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><topic>SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR</topic><topic>SHAPING OR JOINING OF PLASTICS</topic><topic>SOLDERING OR UNSOLDERING</topic><topic>TRANSPORTING</topic><topic>WELDING</topic><topic>WORKING BY LASER BEAM</topic><topic>WORKING OF PLASTICS</topic><topic>WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL</topic><toplevel>online_resources</toplevel><creatorcontrib>WU, XINGKUN</creatorcontrib><creatorcontrib>PARTANEN, JOUNI P</creatorcontrib><creatorcontrib>TANG, NANSHENG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>WU, XINGKUN</au><au>PARTANEN, JOUNI P</au><au>TANG, NANSHENG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Optical system with electronic spot size control and focus control optics</title><date>2006-06-21</date><risdate>2006</risdate><abstract>An illumination system includes optics capable of adjusting the size of a beam of light and adjusting the focus of the beam of light. Spot size control optics adjusts the overall size of the beam of light and separately adjusts the ellipticity of the beam, primarily in one dimension. Light from the spot size control optics passes to focus control optics that control the overall focus of the beam of light and adjust the astigmatism of the beam by altering the focus position of the beam of light in one dimension. The laser system, the spot size control optics and the focus control optics are within an enclosure. Actuators under remote control from outside of the enclosure adjust both of the spot size control optics and focus control optics in the thermal environment of the illumination system.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| subjects | AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTROGRAPHY HOLOGRAPHY INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER MACHINE TOOLS MATERIALS THEREFOR METAL-WORKING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL |
| title | Optical system with electronic spot size control and focus control optics |
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