PROBE LIGHT SCANNING ACTUATOR

Provided is an actuator for scanning detecting light, comprising an optical element for emitting detecting light, a moveable part supporting the optical element, a sheet spring having a fixed end and a moveable end supporting the moveable part; and drive means for driving the moveable part so as to...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FUKUMURA, TAKEO, TOMINAGA, JUN, EZURE, NOBUYA
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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