MEASUREMENT OF FILM THICKNESS BY INELASTIC ELECTRON SCATTERING

A method and apparatus for measuring the thickness of a thin coating, having a thickness on the order of 1 to 10 nm, of one material formed over a substrate of another material of significantly different atomic number, for example, a carbon coating on a ferromagnetic substrate. A primary radiation s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BRYSON, CHARLES, E., III, LINDER, ROBERT, KI YACHKO, DMITRI, VASILYEV, LEONID, A, BORODYANSKY, SERGEY
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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