Fault detection method and apparatus

A method of fault detection groups together operational parameters of a semiconductor processing tool that correlate with one another to generate a fault detection index. These related active sensors are utilized in the selection process of the nearest neighbor vectors to form a vector subset, and a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LYMBEROPOULOS, DIMITRIS P, REISS, TERRY
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES
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