SPECTROSCOPIC ELLIPSOMETER

A spectral ellipsometer that enables complete simultaneous measurement of ellipsometric parameters of a surface with thin films and coatings for the full wavelength range of interest by using an imaging spectrograph together with a novel optical arrangement that disperses the polarization informatio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FLUCKIGER, DAVID, U, KUENY, ANDREW, W
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	COLORIMETRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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